石墨烯 高定向热解石墨HOPG 石墨烯膜氧化硅片
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| Grade | Diameter/Size | Parameter | Orientaion | crystal struction | spectrum penetrate wave length(um) | spectrum refraction rate | Flat |
Surface/Roughness | Parameter |
|---|---|---|---|---|---|---|---|---|---|
| 石墨烯 |
|
intrinsic | <111><100> |
Tetragonal | 0.13～11.3 | 1.39908 | N/A 16mm 22.5mm 32.5mm | polished/etched polished/polished | TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um |
| 高定向热解石墨HOPG | 10*20*1mm 10*10*1mm 20*20*1mm customizition | intrinsic | <111><100> | Tetragonal | 0.13～12.5 | 1.5122~1.3703 | N/A 16mm 22.5mm 32.5mm | polished/etched polished/polished | TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um |
| 墨烯膜氧化硅片 | 25.4mm 50.8mm 76.5mm 100mm | intrinsic | <111><100> | Tetragonal | 0.1 ～ 7.5 | 1.39 ~ 1.43 | N/A 16mm 22.5mm 32.5mm | polished/etched polished/polished | TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um |