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石墨烯

intrinsic

<111><100>

Tetragonal

0.13～11.3

1.39908

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

高定向热解石墨HOPG

10*20*1mm 10*10*1mm 20*20*1mm customizition

intrinsic

<111><100>

Tetragonal

0.13～12.5

1.5122~1.3703

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

石墨烯膜氧化硅片

25.4mm 50.8mm 76.5mm 100mm

intrinsic

<111><100>

Tetragonal

0.1 ～ 7.5

1.39 ~ 1.43

N/A 16mm 22.5mm 32.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

石墨烯高定向热解石墨HOPG 石墨烯膜氧化硅片


Grade	Diameter/Size	Parameter	Orientaion	crystal struction	spectrum penetrate wave length(um)	spectrum refraction rate	Flat	Surface/Roughness	Parameter
石墨烯		intrinsic	<111><100>	Tetragonal	0.13～11.3	1.39908	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
高定向热解石墨HOPG	10201mm 10101mm 20201mm customizition	intrinsic	<111><100>	Tetragonal	0.13～12.5	1.5122~1.3703	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
石墨烯膜氧化硅片	25.4mm 50.8mm 76.5mm 100mm	intrinsic	<111><100>	Tetragonal	0.1 ～ 7.5	1.39 ~ 1.43	N/A 16mm 22.5mm 32.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um