碳化硅陶瓷 碳化硼陶瓷 氧化铝陶瓷 氮化硼陶瓷 氧化锆陶瓷 氮化铝陶瓷

WaferHome can manufacture 碳化硅陶瓷 碳化硼陶瓷 氧化铝陶瓷 氮化硼陶瓷 氧化锆陶瓷 氮化铝陶瓷 Wafer

Specification for 碳化硅陶瓷 碳化硼陶瓷 氧化铝陶瓷 氮化硼陶瓷 氧化锆陶瓷 氮化铝陶瓷片

                   
Grade Diameter/Size Parameter Orientaion crystal struction spectrum penetrate wave length(um) spectrum refraction rate

Flat

Surface/Roughness Parameter
碳化硅陶瓷

10*20*1mm 10*10*1mm 20*20*1mm customizition

intrinsic

<111><100>

Tetragonal 0.13~11.3 1.39908 N/A 16mm 22.5mm 32.5mm polished/etched polished/polished TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
碳化硼陶瓷 10*20*1mm 10*10*1mm 20*20*1mm customizition intrinsic <111><100> Tetragonal 0.13~12.5 1.5122~1.3703 N/A 16mm 22.5mm 32.5mm polished/etched polished/polished TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氧化铝陶瓷 25.4mm 50.8mm 76.5mm 100mm intrinsic <111><100> Tetragonal 0.1 ~ 7.5 1.39 ~ 1.43 N/A 16mm 22.5mm 32.5mm polished/etched polished/polished TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氮化硼陶瓷 25.4mm 50.8mm 76.5mm 100mm intrinsic <111><100> Tetragonal 0.1 ~ 7.5 1.39 ~ 1.43 N/A 16mm 22.5mm 32.5mm polished/etched polished/polished TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氧化锆陶瓷 25.4mm 50.8mm 76.5mm 100mm intrinsic <111><100> Tetragonal 0.1 ~ 7.5 1.39 ~ 1.43 N/A 16mm 22.5mm 32.5mm polished/etched polished/polished TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
氮化铝陶瓷 25.4mm 50.8mm 76.5mm 100mm intrinsic <111><100> Tetragonal 0.1 ~ 7.5 1.39 ~ 1.43 N/A 16mm 22.5mm 32.5mm polished/etched polished/polished TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um