Silicon-On-Insulator(SOI) wafers

WaferHome can manufacture the IC grade Silicon-On-Insulator(SOI) wafers

Specification for Silicon-On-Insulator(SOI) Wafer

  All over wafer device layer buried oxided layer handle layer
Grade resisitivity Geometric parameter Dimeter

Type/dopant

Orientaion

thickness thickness

Orientaion

Surface/Roughness
Bonding SOI wafer customization TTV < 5um Bow< 40um warp <40um 25.4mm 50.8mm 76.5mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30+/-1um customization

0.1-7um

<100> <111> or special orientation

polished/polished
customization TTV < 5um Bow< 40um warp <40um 100mm 125mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 1-30um customization 0.1-7um <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 40um warp <40um 150mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 1-30um customization 0.1-7um <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 40um warp <40um 200mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 1-30um customization 0.1-7um <100> <111> or special orientation polished/etched polished/polished
SIMOX SOI wafer customization TTV < 5um Bow< 20um Warp <20um 25.4mm 50.8mm 76.5mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished
customization TTV < 5um Bow< 20um Warp <20um 100mm 125mm 150mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 10-500nm 0.1-7um <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 20um Warp <20um 200mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 10-500nm 0.1-7um <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 20um Warp <20um 300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 10-500nm 0.1-7um <100> <111> or special orientation polished/etched polished/polished
Pattern Bonding SOI wafer (pattern customization) customization TTV < 5um Bow< 40um warp <40um 25.4mm 50.8mm 76.5mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1000um 2000um customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished
customization TTV < 5um Bow< 40um warp <40um 100mm 125mm 150mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 1000um 2000um customization 0.0001 - 200 Ohm-cm /Customization <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 40um warp <40um 200mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 1000um 2000um customization 0.0001 - 200 Ohm-cm /Customization <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 40um warp <40um 300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 1000um 2000um customization 0.0001 - 200 Ohm-cm /Customization <100> <111> or special orientation polished/etched polished/polished
Pattern SIMOX SOI wafer(pattern customization) customization TTV < 5um Bow< 20um Warp <20um 25.4mm 50.8mm 76.5mm P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

400um+/-20 400um+/- 20 400um+/-20

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished
customization TTV < 5um Bow< 20um Warp <20um 100mm 125mm 150mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 525um+/-20 625um+/-20 625um+/-20 0.0001 - 200 Ohm-cm /Customization <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 20um Warp <20um 200mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 725um+/-20 0.0001 - 200 Ohm-cm /Customization <100> <111> or special orientation polished/etched polished/polished
customization TTV < 5um Bow< 20um Warp <20um 300mm P(Boron) N(Phos/As/Sb) <100> <111> or special orientation 775um+/-20 0.0001 - 200 Ohm-cm /Customization <100> <111> or special orientation polished/etched polished/polished