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	All over wafer	device layer	Buried oxided layer	Handle layer
Grade	Resisitivity	Geometric Parameter	Diameter	Type/dopant	Orientaion	Thickness	Thickness	Orientaion	Surface/Roughness
Bonding SOI Wafers	Customization	TTV < 5um Bow< 40um warp <40um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30+/-1um customization	0.1-7um	<100> <111> or special orientation	polished/polished
Customization	TTV < 5um Bow< 40um warp <40um	100mm 125mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30um customization	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
Customization	TTV < 5um Bow< 40um warp <40um	150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30um customization	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
Customization	TTV < 5um Bow< 40um warp <40um	200mm 300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30um customization	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
Thin Device SOI Wafers	customization	TTV < 5um Bow< 20um Warp <20um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
Cavity SOI Wafer (CSOI)	customization	TTV < 5um Bow< 40um warp <40um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
Silicon On Silicon	customization	TTV < 5um Bow< 20um Warp <20um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization		<100> <111> or special orientation	polished/etched polished/polished
Silicon-on-Glass(SOG)	customization		100mm 125mm 150mm			1 - 300um
customization		100mm 125mm 150mm			20 -1500nm
Gemanium-on-Insulator(GeOI)	customization		100mm 125mm 150mm			1 - 300um
		200mm			20 -1500nm
		300mm			customization
Sappire on Silicon(SOS)	customization		25.4mm 50.8mm 76.5mm			1 - 300um
		100mm 125mm 150mm			20 -1500nm
		200mm 300mm			customization
Sappire on Glass(SOG)	customization		100mm 125mm 150mm			1 - 300um
customization		200mm 300mm			20 -1500nm
LiNbO3 On Insulator(LNOI)	customization		100mm 125mm 150mm			1 - 300um
customization		200mm 300mm			20 -1500nm
LiNbO3 On Insulator(LTOI)	customization		100mm 125mm 150mm			20 -1500nm
customization		200mm 300mm			20 -1500nm
LiTaO3 On Insulator(LTOI)	customization		100mm 125mm 150mm			1 - 300um
customization		200mm 300mm			20 -1500nm
SiC On Insulator(SiCOI)	customization		100mm 125mm 150mm			1 - 300um
customization		200mm 300mm			20 -1500nm
SiC On SiC(Monocrystal) SiC On SiC(3C)	customization		100mm 125mm 150mm			1 - 300um
customization		200mm 300mm			20 -1500nm		3C
Silicon On SiC	customization		100mm 125mm 150mm			1 - 300um
customization		200mm 300mm			20 -1500nm

Bonding SOI Wafers

Customization

TTV < 5um Bow< 40um warp <40um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30+/-1um customization

0.1-7um

<100> <111> or special orientation

polished/polished

Customization

TTV < 5um Bow< 40um warp <40um

100mm 125mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30um customization

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

Customization

TTV < 5um Bow< 40um warp <40um

150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30um customization

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

Customization

TTV < 5um Bow< 40um warp <40um

200mm 300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30um customization

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

Thin Device SOI Wafers

customization

TTV < 5um Bow< 20um Warp <20um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

Cavity SOI Wafer (CSOI)

customization

TTV < 5um Bow< 40um warp <40um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

Silicon On Silicon

customization

TTV < 5um Bow< 20um Warp <20um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

<100> <111> or special orientation

polished/etched polished/polished

Silicon-on-Glass(SOG)

customization

100mm 125mm 150mm

1 - 300um

customization

100mm 125mm 150mm

20 -1500nm

Gemanium-on-Insulator(GeOI)

customization

100mm 125mm 150mm

1 - 300um

200mm

20 -1500nm

300mm

customization

Sappire on Silicon(SOS)

customization

25.4mm 50.8mm 76.5mm

1 - 300um

100mm 125mm 150mm

20 -1500nm

200mm 300mm

customization

Sappire on Glass(SOG)

customization

100mm 125mm 150mm

1 - 300um

customization

200mm 300mm

20 -1500nm

LiNbO3 On Insulator(LNOI)

customization

100mm 125mm 150mm

1 - 300um

customization

200mm 300mm

20 -1500nm

LiNbO3 On Insulator(LTOI)

customization

100mm 125mm 150mm

20 -1500nm

customization

200mm 300mm

20 -1500nm

LiTaO3 On Insulator(LTOI)

customization

100mm 125mm 150mm

1 - 300um

customization

200mm 300mm

20 -1500nm

SiC On Insulator(SiCOI)

customization

100mm 125mm 150mm

1 - 300um

customization

200mm 300mm

20 -1500nm

SiC On SiC(Monocrystal)

SiC On SiC(3C)

customization

100mm 125mm 150mm

1 - 300um

customization

200mm 300mm

20 -1500nm

3C

Silicon On SiC

customization

100mm 125mm 150mm

1 - 300um

customization

200mm 300mm

20 -1500nm

Silicon-On-Insulator(SOI) wafers

Contact info

Specification for Silicon-On-Insulator(SOI) Wafer